Photothermal elastic vibration method: Investigation of the micro-electro-mechanical-systems
نویسندگان
چکیده
منابع مشابه
Fractional Order Control of Micro Electro-Mechanical Systems
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This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2010
ISSN: 1742-6596
DOI: 10.1088/1742-6596/214/1/012105